Manipulators

5-axes-manipulator for scanning electron microscopes SEM

for FEI Company for samples up to Ø 5 inches and a weight of up to 2 kg.


Travel
X- and Y-axis:	155 mm
Z-axis:	10 mm
T-axis:	-10° + 60°
R-axis:	360°
X-, Y- and R-axis are equipped with Piezo-motors.
Accuracy:	0.5 µm
Repeatability:	1 µm
Resolution:	0.2 µm
(Measuring-system by Heidenhain)

for company Zeiss for samples up to Ø 4 inches and a weight of up to 2 kg.


Travel
X- and Y-axis:	130 mm
Z-axis:	50 mm
T-axis:	-4° + 70°
R-axis:	360°
X-, Y- and R-axis are equipped with vacuum-compatible stepper motors.
Accuracy:	0.5 µm
Repeatability:	1 µm

samples up to Ø 4 inches and a weight of up to 2 kg.


Travel
X- and Y-axis:	100 mm
Z-axis:	45 mm
T-axis:	+ 70°
R-axis:	360°
The axes are driven by external DC motors. The accuracy of X- and Y-spindle is ensured by encoders.
Accuracy:	2 µm
Repeatability:	3 µm


Travel
X- and Y-axis:	315 mm
Z-axis:	25 mm
X- and Y-axis are equipped with Piezo-motors. All axes are equipped with measuring systems.
Accuracy:	1 µm
Repeatability:	0.5 µm

for samples up to Ø 8 inches and a weight of up to 1 kg.


Travel
X-axis:	100 mm
Y-axis:	70 mm
Z-axis:	30 mm
T-axis:	-15° + 45°
R-axis:	360°
The axes are driven by external DC motors.
Accuracy:	1 µm
Repeatability:	3 µm